| DESCRIPTION |
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The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor industries using very small sensor (VSS) technology. Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-700 Series provides a continuous transmitter with a very high degree of precision. The SL-700 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.
FEATURES APPLICATIONS
| ? 316 LSS machine body sensor | ? Semiconductor industries |
| ? Sensor material finish 10µin RA electropolished |
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| ? Miniature sensor size reduces liquid volume displacement ? Works with the following chemicals independent |
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| of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA ? High pressure vessel application up to 250 |
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| PSIG (1724 Kpa) (consult factory for higher pressure applications) |
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| ? Accuracy of continuous level transmitter ±0.01 in (0.25 mm) or better ? Continuous transmitter output, 4-20 mA, 1-10 V, |
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| RS-232, remote unit with digital display, two alarm |
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美國精量電子MEAS超聲波液位計SL-700
| Parameter | Typical Value |
| Repeatability | ±0.005 in (0.127 mm) typical |
| Input Power | VDC, 115 VAC/230VAC, 50/60 Hz (optional) |
| Output | Continuous 4-20 mA. 0-5 V or 0-10 V, RS 232 PC compatible, bidirectional communication, two alarm |
| Housing | NEMA 1; NEMA-4X (stainless steel) optional |
| Range | to 10 in (25.4 to 254 mm) (consult factory for longer range |
| Parameter | Typical Value |
| Mounting | ?’ M VCR, ?” F VCR |
| Sensor Material | LSS (standard) |
| Operating Pressure | Up to 250 PSIG (1724 Kpa) |
| Temperature | Sensor: -20 to 200 °F (-29 to 93 °C) Electronics: -20 to 170 °F (-29 to 77 °C) |
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| MECHANICAL DIMENSIONS |
| in inches [mm] |
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美國精量電子MEAS超聲波液位計SL-700
Figure 1: SL-700 series elements electronic module
