- 全金屬結(jié)構(gòu),超潔凈
- 流量范圍廣:1 CCM - 50 LM
- 高溫型號可選(PV-1000S/2000S)
- 外部單元壓力控制
PV-1000
Flow Range | 1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure?Outlet:vacuum?N2equiv) |
---|---|
Flow Control Range | 2 -99% F.S. |
Valve Type | normally open / close |
Input Signal | 0 - 5VDC |
Responce | less than 0.5 sec. |
Operating Temperature | 0 - 50 °C |
Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
Pressure Resistance | 1MPa |
Leak Integrity | 5×10-12Pa?m3(He) |
PV-2000
Flow Range | 10/20 LM |
---|---|
Flow Control Range | 2 -99% F.S. |
Valve Type | normally open / close |
Input Signal | 0 - 5VDC |
Responce | less than 0.5 sec. |
Operating Temperature | 0 - 50 °C |
Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
Pressure Resistance | 1MPa |
Leak Integrity | 5×10-12Pa?m3(He) |
外形尺寸